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NEXIV VMZ-K6555

Overview

Nikon's Confocal NEXIV delivers a new dimension in IC metrology.

The Nikon Confocal NEXIV VMZ-K6555 was developed on the strength of Nikon's leading opto-mechatronics (optical, mechanical and electronic) technologies. It incorporates a variety of confocal optics for fast and accurate evaluation of fine three-dimensional surface metrology, image processing technology, and TT L laser autofocus. It allows both 2D and height measurements in the same field of view.

The Confocal NEXIV VMZ-K6555 is used for the inspection and measurement of critical dimensions of highly complex structures on advanced semiconductor devices, probe cards, substrate patterns on circuit boards, MEMS and a variety of other demanding applications.

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Categories: Vision Systems

Applications: Surface Analysis, MEMS, Telecom & Electronics, Cracks and Failure Analysis, Mobile phones, shavers & watches , Telescope optics