The Optistation-V has been discontinued.
A cost-effective inspection unit featuring a small footprint and a full range of optical techniques.
The Optistation-V offers an ergonomic design and a user-friendly operating environment. This compact-size wafer inspection system also offers high accuracy and high throughput. The Optistation-V macro illuminators simplify visual macro inspections of unevenness, defocus, and other items that had been difficult to observe in conventional systems.
Categories: Semiconductor Equipment