Nikon Metrology / Products / Semiconductor Systems / Semiconductor Equipment / Optistation-V

Nikon Optistation-V Wafer Inspection System

The Optistation-V has been discontinued.


A cost-effective inspection unit featuring a small footprint and a full range of optical techniques.

The Optistation-V offers an ergonomic design and a user-friendly operating environment. This compact-size wafer inspection system also offers high accuracy and high throughput. The Optistation-V macro illuminators simplify visual macro inspections of unevenness, defocus, and other items that had been difficult to observe in conventional systems.

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Categories: Semiconductor Equipment

Applications: Wafers