Nikon Metrology / Products / Semiconductor Systems / Semiconductor Equipment / Optistation-3200

Optistation-3200

Available in Americas only

Overview

Redefining 300mm wafer inspection with Nikon's CFI60 optical design.

One of Nikon's most advanced and versatile semiconductor inspection systems, the Optistation 3200 provides three-mode macro inspection capability – front, backside center, and backside perimeter – as well as high performance lighting techniques that allow for detection of a wide variety of process defects and particle/scratch detection.

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Categories: Semiconductor Equipment

Applications: Wafers