Nikon Metrology / Products / Semiconductor Systems / Semiconductor Equipment / Optistation-3100

Nikon Optistation-3100 Wafer Inspection System

Available in Americas only


A compact solution for 300mm wafer inspection in diverse applications.

Engineered to provide cost-effective support for 300mm wafers with a minimal footprint, the Optistation-3100 features an advanced micro/macro system in a compact, flexible design. The optical system offers brighter images, and observation techniques can be programmed for each objective magnification and each substrate layer to be inspected.

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Categories: Semiconductor Equipment

Applications: Wafers