Nikon Metrology / Products / Semiconductor Systems / Semiconductor Equipment / NEXIV FOUP

Nikon NEXIV FOUP Wafer Carrier Measuring System


Provides all dimensional measurements required for wafer carrier fabrication including control of deformation due to aging of wafer carriers.

The NEXIV VMR-C4540 - designed for use with 300mm Front Opening Unified Pod (FOUP) & Front Opening Shipping Box (FOSB) wafer carriers - detects hard to see edges using a variety of illumination features as well as Nikon's unique image processing technologies. By incorporating laser AF that provides quick non-contact focusing, even on transparent surfaces and on the edge of the peripheries of the wafer, the VMR-C4540 is able to measure SEMI-standard dimensions with excellent accuracy.

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Categories: Semiconductor Equipment

Applications: Powertrain Components, Telecom & Electronics, Wafers, Automated measurement, Telescope optics, Antennae, Mobile phones, shavers & watches