Nikon Metrology / Products / Semiconductor Systems / Semiconductor Equipment / AMI/NFDM

Nikon AMI/NFDM Precision Pattern Profiler

Available in Americas only

Overview

A new lithography inspection platform designed to improve product yield by capturing yield-limiting defects.

The AMI/NFDM system is designed for automated pattern profile management and line width roughness monitoring of 300mm wafers with fully incorporated macro defect detection, EBR inspection, and automatic defect classification for unsurpassed performance down to the 55nm node.

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Categories: Semiconductor Equipment

Applications: Wafers