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Nikon Metrology enhances observation performance and operation with introduction of Eclipse L300N/L300ND

July 13, 2010

Enhanced Epi-Fluorescence Widens Inspection Range – Including Inspection Capability for 300mm Wafers and OLEDs; Motorized Nosepiece is Three Times More Durable
Leuven, July 13 – Nikon Metrology introduces the Eclipse L300N/L300ND, a FPD/LSI inspection microscope with an enhanced Epi-Fluorescence function enabling 365nm UV excitation optimal for the inspection of semiconductor resist residues on 300mm wafers and organic electroluminescence displays (OLEDs). The system also incorporates Nikon’s world renowned infinity optics, CFI60, offering both image brightness through high NA and wider sample range and access with long working distance.
The motorized universal nosepiece on the Eclipse L300/L300N is three times more durable than conventional models. It incorporates an anti-flash mechanism, which engages when the nosepiece is rotated to protect the operator’s eye. In addition, a centering mechanism is possible at three nosepiece positions to minimize image shifts when changing the objective magnification. USB interface is available for nosepiece position output to DS-L2 and U2 as well as control of nosepiece through Nikon’s NIS-Elements software.
“With the Epi-Fluorescence observation, UV excitation is now possible. This is highly beneficial in the inspection of semiconductor wafers and OLEDs,” said Koji Kiribuchi, Marketing Manager, Nikon Metrology, Inc.
The Eclipse L300/L300ND employs a high-intensity 12V-50W halogen illuminator that is brighter than that of a standard 12V-100W illuminator while consuming half the power. Incorporating a lamphouse rear mirror and optimizing the size of the lamp filament allows effective and uniform illumination on the pupil plane. Objectives with a magnification of 50x or higher benefit from an increased brightness of 20 percent compared to the 12V-100W illuminator. In addition, the Eclipse L300ND model employs a new light source and an advanced optical design, which provides diascopic illumination four times brighter than the conventional model.
In addition, the Eclipse L300N/L300ND feature antistatic coatings for stronger safeguards against contamination. Antistatic coatings have been applied to the body, stage, eyepiece tube and other various controls, helping prevent damage to samples caused by electrostatic charges, thus contributing to higher yields.